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Identification of critical parameters for plasma process-induced damage in 130 and 100 nm CMOS technologies
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Authors
Van den Bosch, Geert
;
De Jaeger, Brice
;
Tokei, Zsolt
;
Groeseneken, Guido
Conference
ESSDERC - 32nd European Solid-State Device Research Conference
Title
Identification of critical parameters for plasma process-induced damage in 130 and 100 nm CMOS technologies
Publication type
Proceedings paper
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