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Anomalous low-temperature dopant diffusion from in-situ doped polycrystalline and epitaxial Si layers into the monocrystalline Si substrate
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Authors
Caymax, Matty
;
Baert, Kris
;
Poortmans, Jef
;
Vandervorst, Wilfried
Issue
1
Journal
J. Vac. Sci. Technol. B
Volume
12
Title
Anomalous low-temperature dopant diffusion from in-situ doped polycrystalline and epitaxial Si layers into the monocrystalline Si substrate
Publication type
Journal article
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