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Study of the influence of the nonequilibrium point defect concentration gradient on the dopant flux during ion implantation in silicon at high temperatures

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1992 since deposited on 2021-09-29
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Acq. date: 2026-08-28

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1992 since deposited on 2021-09-29
1last month
1last week
Acq. date: 2026-08-28

Citations