Publication:

Study of the influence of the nonequilibrium point defect concentration gradient on the dopant flux during ion implantation in silicon at high temperatures

Date

Loading...
Thumbnail Image

Journal

Abstract

Description

Statistics

Views

1989 since deposited on 2021-09-29
2last month
Acq. date: 2026-04-08

Citations

Statistics

Views

1989 since deposited on 2021-09-29
2last month
Acq. date: 2026-04-08

Citations