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Co-silicide, Co(Ni)-silicide and Ni-silicide to source/drain contact resistance
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Authors
Akheyar, Amal
;
Lauwers, Anne
;
Kittl, Jorge
;
de Potter de ten Broeck, Muriel
;
Chamirian, Oxana
;
Jonckheere, Rik
;
Leunissen, Peter
;
Van Dal, Mark
;
Lindsay, Richard
;
Tempel, Georg
;
Maex, Karen
Conference
Advanced Short-Time Thermal Processing for Si-based CMOS devices
Title
Co-silicide, Co(Ni)-silicide and Ni-silicide to source/drain contact resistance
Publication type
Proceedings paper
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