Authors

Benedetti, Alessandro; Norris, D.J.; Hetherington, C.J.D.; Cullis, A.G.; Robbins, D.J.; Wallis, D.J.

Conference

Microscopy of Semiconducting Materials XIII

Title

FEG-TEM analysis of the effects of Ge segregation and germane flux on the Ge profile across nm-scale SiGe layers, grown by both MBE and CVD

Publication type

Proceedings paper

Embargo date

9999-12-31