Publication:

Deep UV lithography for planar photonic crystal structures

Date

2003-10

Proceedings Paper

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Author(s)

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Van Campenhout, Joris

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;

Wouters, Johan M. D.

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Taillaert, Dirk

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Luyssaert, Bert

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Van Thourhout, Dries

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1993 since deposited on 2021-10-15

Acq. date: 2026-05-18