Deep UV lithography for planar photonic crystal structures

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Authors
Bogaerts, Wim; Dumon, Pieter; Van Campenhout, Joris; Wiaux, Vincent; Wouters, Johan M. D.; Beckx, Stephan; Taillaert, Dirk; Luyssaert, Bert; Van Thourhout, Dries; Baets, Roel
Conference
Proceedings 16th Annual Meeting of the IEEE Lasers & Electro-Optics Society - LEOS
Title
Deep UV lithography for planar photonic crystal structures
Publication type
Proceedings paper
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