Publication:
Effect of Al-content and post deposition annealing on the electrical properties of ultra-thin HfAlxOy layers
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1992 since deposited on 2021-10-15
1last month
Acq. date: 2026-02-25
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Statistics
Views
1992 since deposited on 2021-10-15
1last month
Acq. date: 2026-02-25
Citations