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Threshold voltage instability in CMOS high-K dielectrics: comparison between hafnium and aluminum oxide
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Authors
Cimino, S.
;
Pantisano, Luigi
;
Pacagnella, A.
;
Groeseneken, Guido
Conference
34th IEEE Semiconductor Interface Specialists Conference - SISC
Title
Threshold voltage instability in CMOS high-K dielectrics: comparison between hafnium and aluminum oxide
Publication type
Oral presentation
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