TOF-SIMS as a rapid diagnostic tool to monitor the growth mode of thin (high k) films

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Authors

Conard, Thierry; Vandervorst, Wilfried; Petry, Jasmine; Zhao, Chao; Besling, W.; Nohira, Hiroshi; Richard, Olivier

Journal

Applied Surface Science

Volume

203-204

Title

TOF-SIMS as a rapid diagnostic tool to monitor the growth mode of thin (high k) films

Publication type

Journal article

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