Authors

De Gendt, Stefan; Caymax, Matty; Chen, Jerry; Claes, Martine; Conard, Thierry; Delabie, Annelies; Deweerd, Wim; Kaushik, Vidya; Kerber, Andreas; Kubicek, Stefan; Niwa, Masaaki; Pantisano, Luigi; Puurunen, Riikka; Ragnarsson, Lars-Ake; Schram, Tom; Shimamoto, Yasuhiro; Tsai, Wilman; Röhr, Erika; Van Elshocht, Sven; Witters, Thomas; Young, Edward; Zhao, Chao; Heyns, Marc

Conference

204th Meeting of the Electrochemical Society: 2nd Int. Symp. on High Dielectric Constant Materials

Title

Scaling of Hf-based gate dielectrics - integration with polysilicon gates

Publication type

Meeting abstract