Publication:

Enhanced initial growth of atomic layer deposited metal oxides on hydrogen-terminated silicon

Date

2003

Journal article

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Author(s)

Frank, Martin M.

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Chabal, Yves J.

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;

Delabie, Annelies

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;

;

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da Rosa, Elisa B.O.

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Baumvol, Israel J.R.

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Stedile, Fernanda C.

Journal

Applied Physics Letters

Statistics

1932 since deposited on 2021-10-15

Acq. date: 2026-05-18