Authors

Frank, Martin M.; Chabal, Yves J.; Green, Martin; Delabie, Annelies; Brijs, Bert; Wilk, Glen D.; Ho, Mun-Yee; da Rosa, Elisa B.O.; Baumvol, Israel J.R.; Stedile, Fernanda C.

Issue

4

Journal

Applied Physics Letters

Volume

83

Title

Enhanced initial growth of atomic layer deposited metal oxides on hydrogen-terminated silicon

Publication type

Journal article