Publication:
Multitechnique characterisation of Al203 thin layers deposited on SiO2/Si surface by atomic layer chemical vapour deposition
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1973 since deposited on 2021-10-15
1last month
Acq. date: 2026-10-13
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Statistics
Views
1973 since deposited on 2021-10-15
1last month
Acq. date: 2026-10-13
Citations