Effects of interactions between HfO2 and poly-Si on MOSCAP and MESFET electrical behaviour

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Authors
Kaushik, Vidya; Röhr, Erika; De Gendt, Stefan; Delabie, Annelies; Van Elshocht, Sven; Claes, Martine; Shimamoto, Yasuhiro; Ragnarsson, Lars-Ake; Witters, Thomas; Manabe, Y.; Heyns, Marc
Conference
Extended Abstracts International Workshop on Gate Insulator - IWGI
Title
Effects of interactions between HfO2 and poly-Si on MOSCAP and MESFET electrical behaviour
Publication type
Proceedings paper
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