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Charge trapping and dielectric reliability of SiO2/AI2O3 gate stacks with TiN electrodes
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Authors
Kerber, Andreas
;
Cartier, Eduard
;
Degraeve, Robin
;
Roussel, Philippe
;
Pantisano, Luigi
;
Kauerauf, Thomas
;
Groeseneken, Guido
;
Maes, Herman
;
Schwalke, U.
Issue
5
Journal
IEEE Trans. Electron Devices
Volume
50
Title
Charge trapping and dielectric reliability of SiO2/AI2O3 gate stacks with TiN electrodes
Publication type
Journal article
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