Publication:

Ni- and Co-based silicides for advanced CMOS applications

Date

2003

Journal article

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Author(s)

;

;

Chamirian, Oxana

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;

;

de Potter de ten Broeck, Muriel

;

Lindsay, Richard

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Journal

Microelectronic Engineering

Statistics

1934 since deposited on 2021-10-15

Acq. date: 2026-02-26