Authors

Lindsay, Richard; Pawlak, Bartek; Kittl, Jorge; Henson, Kirklen; Giangrandi, Simone; Duffy, Ray; Surdeanu, Radu; Vandervorst, Wilfried; Pagès, Xavier; Van der Jeugd, Kees; Stolk, P.; Maex, Karen

Conference

Ultra Shallow Junctions. 7th Int. Worksh. Fabrication, Characterization and Modeling of Ultra Shallow Doping Profiles in Semic.

Title

Leakage optimatisation of ultra-shallow junctions formed by solid phase epitaxial regrowth (SPER)

Publication type

Proceedings paper