Publication:
A microstructural study of the thermal stability of atomic layer deposited Al2O3 thin films
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2031 since deposited on 2021-10-15
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Acq. date: 2026-07-16
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Statistics
Views
2031 since deposited on 2021-10-15
1last month
1last week
Acq. date: 2026-07-16
Citations