Publication:
The role of fluorine with Ge pre-amorphisation in forming PMOS junctions for the 65-nm CMOS technology node
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1980 since deposited on 2021-10-15
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Acq. date: 2026-08-01
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1980 since deposited on 2021-10-15
2last month
2last week
Acq. date: 2026-08-01
Citations