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An ESCA study on ion beam induced oxidation of Si
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Authors
Osiceanu, Petre
;
Alay, Josep Lluis
;
De Coster, Walter
Conference
18th International Semiconductor Conference. CAS'95 Proceedings
Title
An ESCA study on ion beam induced oxidation of Si
Publication type
Proceedings paper
Embargo date
9999-12-31
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