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Feature biasing versus feature-assisted lithography. A comparison of proximity correction methods for 0.5*(l/NA) lithography
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1982 since deposited on 2021-09-29
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Acq. date: 2026-01-06
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1982 since deposited on 2021-09-29
1last month
1last week
Acq. date: 2026-01-06
Citations