Reliability studies of MOCVD TiSin and EnCoRe Ta(N)/Ta

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Authors

Tokei, Zsolt; Kelleher, Deirdre Maria; Mebarki, Bencherki; Mandrekar, T.; Guggilla, S.; Maex, Karen

Issue

2_4

Journal

Microelectronic Engineering

Volume

70

Title

Reliability studies of MOCVD TiSin and EnCoRe Ta(N)/Ta

Publication type

Journal article

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