Critical metrology for ultrathin high k dielectrics

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Authors
Vandervorst, Wilfried; Brijs, Bert; Bender, Hugo; Conard, Thierry; Petry, Jasmine; Richard, Olivier; Blasco, X.; Nafría, M.
Conference
Characterization and Metrology for ULSI Technology
Title
Critical metrology for ultrathin high k dielectrics
Publication type
Proceedings paper
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