Physical characterization of ultrathin high k dielectrics

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Authors
Vandervorst, Wilfried; Brijs, Bert; Bender, Hugo; Conard, Thierry; Petry, Jasmine; Richard, Olivier; Van Elshocht, Sven; Delabie, Annelies; Caymax, Matty; De Gendt, Stefan; Cosnier, Vincent; Green, Martin; Chen, Jerry
Conference
8th International Symposium on Plasma-and Process-Induced Damage
Title
Physical characterization of ultrathin high k dielectrics
Publication type
Proceedings paper
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