Publication:

Physical characterization of ultrathin high k dielectrics

Date

2003

Proceedings Paper

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Author(s)

Vandervorst, Wilfried

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;

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Conard, Thierry

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;

Richard, Olivier

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Van Elshocht, Sven

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Delabie, Annelies

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;

De Gendt, Stefan

;

Cosnier, Vincent

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;

Metrics

1949 since deposited on 2021-10-15

Acq. date: 2026-01-09