Authors

Zhao, Chao; Brijs, Bert; Dortu, Fabian; De Gendt, Stefan; Caymax, Matty; Heyns, Marc; Besling, W.; Maes, Jan

Conference

Analytical Techniques for Semiconductor Materials and Processes

Title

Application of x-ray fluorescence spectrometry in charaterization of high-k uktra-thin films

Publication type

Proceedings paper

Embargo date

9999-12-31