Publication:
HfONx high-k layers deposited by MOCVD in mixed gas flows of N2O and O2
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1945 since deposited on 2021-10-15
4last month
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Acq. date: 2026-08-06
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Statistics
Views
1945 since deposited on 2021-10-15
4last month
3last week
Acq. date: 2026-08-06
Citations