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Ellipsometric porosimetry of porous low-k films with quazi-closed cavities
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Authors
Baklanov, Mikhaïl
;
Mogilnikov, K.P.
;
Yim, J-H.
Conference
Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics
Title
Ellipsometric porosimetry of porous low-k films with quazi-closed cavities
Publication type
Proceedings paper
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