H2O2 decomposition and its impact on silicon surface roughening and gate oxide integrity

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Authors

Schmidt, Harald; Meuris, Marc; Rotondaro, Antonio; Heyns, Marc; Hurd, Trace; Hatcher, Z.

Issue

2B

Journal

Japanese Journal of Applied Physics. Part 1

Volume

34

Title

H2O2 decomposition and its impact on silicon surface roughening and gate oxide integrity

Publication type

Journal article

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