VUV spectroscopic ellipsometry applied to the characterization of high-k dielectrics

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Authors

Boher, P.; Defranoux, C.; Heinrich, P.; Wolstenholme, J.; Bender, Hugo

Issue

1_3

Journal

Materials Science & Engineering B

Volume

109

Title

VUV spectroscopic ellipsometry applied to the characterization of high-k dielectrics

Publication type

Journal article

Embargo date

9999-12-31

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