Authors

Bruynseraede, Christophe; Fisher, A.H.; Ungar, F.; Schuhmacher, Jorg; Sutcliffe, Victor; Michelon, Julien; Maex, Karen

Conference

Proceedings of the IEEE International Interconnect Technology Conference

Title

Comprehensive electromigration studies of dual-damascene Cu interconnects with ALD WCxNy barriers

Publication type

Proceedings paper