Authors

Claes, Martine; De Gendt, Stefan; Witters, Thomas; Kaushik, Vidya; Conard, Thierry; Zhao, Chao; Manabe, Y.; Delabie, Annelies; Röhr, Erika; Chen, Jerry; Tsai, Wilman; Heyns, Marc

Issue

11

Journal

Journal of the Electrochemical Society

Volume

151

Title

Effect of postdeposition anneal conditions on defect density of HfO2 layers measured by wet etching

Publication type

Journal article