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Effect of postdeposition anneal conditions on defect density of HfO2 layers measured by wet etching
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1959 since deposited on 2021-10-15
2last month
Acq. date: 2026-01-11
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Metrics
Views
1959 since deposited on 2021-10-15
2last month
Acq. date: 2026-01-11
Citations