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Towards a complete description of line width roughness: a comparison of different methods for vertical and spatial LER and LWR analysis
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1873 since deposited on 2021-10-15
422item.page.metrics.field.last-week
Acq. date: 2025-10-25
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Metrics
Views
1873 since deposited on 2021-10-15
422item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations