Authors

De Gendt, Stefan; Beckx, Stephan; Caymax, Matty; Claes, Martine; Conard, Thierry; Delabie, Annelies; Deweerd, Wim; Hellin, David; Kraus, Harald; Onsia, Bart; Paraschiv, Vasile; Puurunen, Riikka; Rohr, Erika; Snow, Jim; Tsai, Wilman; Van Doorne, Patrick; Van Elshocht, Sven; Vertommen, Johan; Witters, Thomas; Heyns, Marc

Conference

Cleaning Technology in Semiconducting Device Manufacturing VIII. Proceedings of the International Symposium

Title

Integration of high-K gate dielectrics - wet etch, cleaning and surface conditioning

Publication type

Proceedings paper

Embargo date

9999-12-31