Analysis of junctions formed in strained Si/SiGe substrates

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Authors
Eneman, Geert; Simoen, Eddy; Lauwers, Anne; Lindsay, Richard; Verheyen, Peter; Delhougne, Romain; Loo, Roger; Caymax, Matty; Meunier-Beillard, Philippe; Demuynck, Steven; De Meyer, Kristin; Vandervorst, Wilfried
Conference
High-Mobility Group-IV Materials and Devices
Title
Analysis of junctions formed in strained Si/SiGe substrates
Publication type
Proceedings paper
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