Challenges in patterning 45nm node multiple-gate devices and SRAM cells

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Authors
Ercken, Monique; Delvaux, Christie; Baerts, Christina; Locorotondo, Sabrina; Degroote, Bart; Wiaux, Vincent; Nackaerts, Axel; Rooyackers, Rita; Verhaegen, Staf; Pollentier, Ivan
Conference
Proceedings 41st Interface Symposium
Title
Challenges in patterning 45nm node multiple-gate devices and SRAM cells
Publication type
Proceedings paper
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