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The novel use of low temperature hydrogenated microcrystalline silicon germanium (µcSiGe:H) for MEMS applications
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Authors
Gromova, Maria
;
Baert, Kris
;
Van Hoof, Chris
;
Mehta, A.
;
Witvrouw, Ann
Issue
1_4
Journal
Microelectronic Engineering
Volume
76
Title
The novel use of low temperature hydrogenated microcrystalline silicon germanium (µcSiGe:H) for MEMS applications
Publication type
Journal article
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