Publication:
The novel use of low temperature hydrogenated microcrystalline silicon germanium (µcSiGe:H) for MEMS applications
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1862 since deposited on 2021-10-15
Acq. date: 2026-01-09
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Views
1862 since deposited on 2021-10-15
Acq. date: 2026-01-09
Citations