Electrical characteristics of Ge/GeOx(N)/HfO2 gate stacks

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Authors
Houssa, Michel; De Jaeger, Brice; Delabie, Annelies; Van Elshocht, Sven; Afanasiev, Valeri; Autran, J.L.; Stesmans, Andre; Meuris, Marc; Heyns, Marc
Conference
5th Symposium on SiO2, Advanced Dielectrics, and Related Devices
Title
Electrical characteristics of Ge/GeOx(N)/HfO2 gate stacks
Publication type
Oral presentation
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