Publication:
ToF-SIMS depth profiling of Hf and Al composition variations in ultrathin mixed HfO2/Al2O3 oxides
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1931 since deposited on 2021-10-15
1last month
Acq. date: 2026-06-01
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Statistics
Views
1931 since deposited on 2021-10-15
1last month
Acq. date: 2026-06-01
Citations