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Energy and angular dependence of the sputter yield and ionization yield of Ge bombarded by O2+
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Authors
Huyghebaert, Cedric
;
Conard, Thierry
;
Vandervorst, Wilfried
Journal
Applied Surface Science
Volume
231-232
Title
Energy and angular dependence of the sputter yield and ionization yield of Ge bombarded by O2+
Publication type
Journal article
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