Authors

Iacopi, Francesca; Travaly, Youssef; Stucchi, Michele; Struyf, Herbert; Peeters, Stefan; Jonckheere, Rik; Leunissen, Peter; Tokei, Zsolt; Sutcliffe, Victor; Richard, Olivier; Van Hove, Marleen; Maex, Karen

Conference

Materials,Technology, and Reliability of Andvanced Interconnects and Low-K Dielectrics

Title

Sidewall damage and electrical performance of porous dielectrics in narrow spaced interconnects

Publication type

Proceedings paper