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Optimal frequency range selection for full C-V characterization above 45MHz for ultra thin (1.2-nm) nitrided oxide MOSFETs
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Authors
Jeamsaksiri, Wutthinan
;
Mercha, Abdelkarim
;
Ramos, Javier
;
Decoutere, Stefaan
;
Cubaynes, Florence
Conference
Proceedings of the International Conference on Microelectronic Test Structures - ICMTS
Title
Optimal frequency range selection for full C-V characterization above 45MHz for ultra thin (1.2-nm) nitrided oxide MOSFETs
Publication type
Proceedings paper
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