Applications of Ni-based silicides to 45 nm CMOS and beyond

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Authors
Kittl, Jorge; Lauwers, Anne; Chamirian, Oxana; Pawlak, Malgorzata; Van Dal, Mark; Akheyar, Amal; de Potter de ten Broeck, Muriel; Kottantharayil, Anil; Pourtois, Geoffrey; Lindsay, Richard; Maex, Karen
Conference
Silicon Front-End Junction Formation - Physics and Technology
Title
Applications of Ni-based silicides to 45 nm CMOS and beyond
Publication type
Proceedings paper
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