Characteristics of low-energy nitrogen ion-implanted oxide and NO-annealed gate dielectrics

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Authors

Lee, Shih Chung; Simoen, Eddy; Badenes, Gonçal

Issue

9

Journal

Solid-State Electronics

Volume

48

Title

Characteristics of low-energy nitrogen ion-implanted oxide and NO-annealed gate dielectrics

Publication type

Journal article

Embargo date

9999-12-31

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