Publication:

Integration of low and high temperature junction anneals for 45nm CMOS

Date

2004

Proceedings Paper

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Files

9283.pdf 578.97 KB

Author(s)

Lindsay, Richard

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Henson, Kirklen

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Satta, Alessandra

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Statistics

1875 since deposited on 2021-10-15

Acq. date: 2026-02-26