Strained Si on relaxed SiGe made by ion implantation and strain transfer

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Authors
Mantl, S.; Buca, D.; Holländer, B.; Mörschbächer, M.; Trinkhaus, H.; Luysberg, M.; Hueging, N.; Houben, L.; Carius, R.; Loo, Roger; Caymax, Matty; Schäfer, H.
Conference
SiGE: Materials, Processing, and Devices
Title
Strained Si on relaxed SiGe made by ion implantation and strain transfer
Publication type
Proceedings paper
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