Chemical and electrical dopants profile evolution during solid phase epitaxial regrowth

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Authors

Pawlak, Bartek; Lindsay, Richard; Surdeanu, Radu; Dieu, Bjorn; Geenen, Luc; Hoflijk, Ilse; Richard, Olivier; Duffy, Ray; Clarysse, Trudo; Brijs, Bert; Vandervorst, Wilfried

Issue

1

Journal

Journal of Vacuum Science and Technology B

Volume

22

Title

Chemical and electrical dopants profile evolution during solid phase epitaxial regrowth

Publication type

Journal article

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