Publication:
The role of preamorphization and activation for ultra shallow junction formation on strained Si layers grown on SiGe buffer
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1906 since deposited on 2021-10-15
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Acq. date: 2026-10-10
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Statistics
Views
1906 since deposited on 2021-10-15
2last month
2last week
Acq. date: 2026-10-10
Citations