Mask topography effect in chromeless phase lithography

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Authors
Philipsen, Vicky; Bekaert, Joost; Vandenberghe, Geert; Jonckheere, Rik; Van Den Broecke, D.; Socha, R.
Conference
24th Annual BACUS Symposium on Photomask Technology
Title
Mask topography effect in chromeless phase lithography
Publication type
Proceedings paper
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