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Comprehensive study of TSUPREM4 boron diffusion modeling in SiGeC base layers under critical RTA conditions
Publication:
Comprehensive study of TSUPREM4 boron diffusion modeling in SiGeC base layers under critical RTA conditions
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Date
2004
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Sibaja-Hernandez, Arturo
;
Xu, Mingwei
;
Decoutere, Stefaan
;
Maes, Herman
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1969
since deposited on 2021-10-15
Acq. date: 2026-08-05
Citations
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Views
1969
since deposited on 2021-10-15
Acq. date: 2026-08-05
Citations