Publication:

Barrier reliability on sub-100nm copper low-k interconnects

Date

2004
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Author(s)

Tokei, Zsolt  
;
Gailledrat, T.
;
Li, Yunlong  
;
Schuhmacher, Jorg
;
Mandrekar, T.
;
Guggilla, S.
;
Mebarki, Bencherki
;
Maex, Karen  

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2081 since deposited on 2021-10-15
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