Authors

Tsai, W.; Maes, J.W.; De Witte, Hilde; Chen, J.; Delabie, Annelies; Carter, Richard; Richard, Olivier; Caymax, Matty; Conard, Thierry; Young, Edward; De Gendt, Stefan

Conference

Physics and Technology of High-k Gate Dielectrics II

Title

Plasma modification of Hf based high-k dielectrics: effect of nitridation and silicon nitride deposition

Publication type

Proceedings paper